Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Electrical characterization of waterside corrosion films formed on ZrNb(1%)O(0.13%)

Oxide films formed by water oxidation at 360°C on ZrNb(1%)O(0.13%) for several durations (50-300 days) were studied by impedance spectroscopy (IS) in gaseous atmosphere. The electrical behavior of oxide layers was investigated as a function of the temperature (25-300°C) at constant oxygen partial pressure (0.3 Pa). Cole-Cole diagrams suggest a frequency-temperature equivalence. A simple electrical model has been derived from the as-deduced 14 decade master curve. Equivalent circuit includes a series association of two layers exhibiting different dielectric properties: a dense layer near the oxide-metal interface and a porous layer at the waterside. Electronic conductivity is predominant within the whole temperature range, but ionic contribution was proposed to increase for temperature higher than 170°C. During the parabolic oxidation step, the oxide thickness of the barrier layer increases but oxide growth would not be only a geometrical one. The kinetic modification to a constant oxidation rate was observed to be correlated to the increase of the dense layer thickness. Such a behavior suggests that the mechanism controlling oxidation rate is not a pure mechanism of oxygen diffusion through this layer. Finally, a qualitative model of activated electrons transport based on an hopping mechanism was proposed in order to take into account that the Arrhenius diagrams of both total conductivity and dispersion factor are characterized by a break point with two activation energy values.     

Microstructural investigation of the breakdown of the protective oxide scale on a 304 steel in the presence of oxygen and water vapour at 600 °C

This article focuses on the detailed microstructural investigation of the oxide scale formed on a 304 steel in the presence of oxygen and water vapour (40%) at 600 °C. The work has been carried out using a combination of microanalytical techniques including FIB, TEM, EDX and electron diffraction. The local breakdown of the initially protective oxide scale and the growth of island/crater oxide morphology are described. Special consideration is given to the influence of the microstructure of the steel and the oxide scale on the breakdown behaviour.     

大港渣油掺兑催化油浆氧化沥青的研究

重油催化裂化外甩油浆中富含芳烃，可望在国产原油生产优质道路沥青上发挥作用。对大港环烷基渣油中掺兑一定比例的油浆后氧化改善道路沥青性质的可能性进行了研究，结果表明：渣油掺兑油浆氧化，不仅可以有效改善沥青延度，同时也为油浆的合理利用开辟了一条新途径。     

Non-invasive headspace measurement for characterizing oxygen-scavenging in polymers

A non-invasive headspace analysis method to measure rate and amount of oxygen uptake in oxygen-scavenging polymers is presented. Oxygen uptake data for metal-catalyzed poly(1,4-butadiene) at 30 °C are provided to illustrate the method. These data were obtained by measuring oxygen headspace concentration above the scavenging polymer with an OxySense^® 200T non-invasive oxygen sensor, and, for comparison, oxygen uptake was measured with an analytical balance. Excellent agreement was observed between these two independent experiments.     

A study of synthesizing benzaldehydes from propenylbenzenes and cinnamic acid derivatives

Propenylbenzenes and cinnamic acid derivatives yield correspondingly substituted benzaldehydes when oxidized by lead-ruthenium pyrochlore oxide in the presence of sodium hydrochlorite as a co-oxidant at pH 11 under heterogeneous conditions. The reaction of terminal and internal aliphatic alkenes under similar conditions affords no aldehydes.     

The oxidation of two ternary Ni-Cu-10 at.% Al alloys in 1 atm of pure O2 at 800-900 °C

The oxidation of the ternary alloys Ni-45Cu-10Al and Ni-30Cu-10Al has been studied at 800-900 °C under 1 atm O₂. The presence of 10 at.% Al reduces significantly the oxidation rate of the corresponding Cu-Ni alloys during the initial oxidation stages, even before the establishment of a complete Al₂O₃ layer. The weight of individual sample of the two ternary Ni-Cu-10Al alloys at 800 °C increases more rapidly than at 900 °C during the initial oxidation stage. As oxidation proceeds, the weight gain at 800 °C slows down to a degree that the total weight gain after 24 h oxidation at 800 °C is less than that at 900 °C. Due to a faster formation of the Al₂O₃ layer, which suppresses earlier the further oxidation of Cu and Ni, the external region of the scales grown on Ni-45Cu-10Al contain much less Cu and Ni oxides than those grown on Ni-30Cu-10Al. The transition from the internal oxidation to the selective external oxidation of the most reactive component Al in Ni-Cu-Al alloys is favored by higher values of the Al content, of temperature and of the Cu/Ni ratio.     

An Investigation of the Reduction and Reoxidation of Isolated Vanadate Sites Supported on MCM-48

The reduction and subsequent reoxidation of isolated vanadate species supported on silica was investigated using temperature-programmed reduction and oxidation, along with in-situ XANES and Raman spectroscopy. Approximately 70–80% of the vanadium was reduced to V³⁺ after reduction in H₂ at temperatures up to 923 K. Upon reduction, the vanadyl oxygen was removed and the three remaining V–O bonds are lengthened by 0.2 Å. The vanadate species are rapidly reoxidized when exposed to O₂, with the amount of oxygen uptake matching well with the amount removed during reduction. In-situ Raman spectroscopy during reoxidation in ¹⁸O₂ showed that significant scrambling occurs between gas phase oxygen and surface oxygen species during the reoxidation of the vanadate species.     

On the role of acidity in catalytic oxidation

The role of the catalyst surface acid-base properties on the heterogeneously-catalyzed oxidation reaction mechanisms is discussed. Acid-base properties depend on the covalent/ionic character of the metal-oxygen bonds and are involved in some steps of the oxidation reactions, such as the activation of the C---H hydrocarbon bonds, the step associated with the evolution of alkoxide species and the desorption/overoxidation of the partial oxidation products. Thus they participate with the cation redox properties in determining the selective/unselective catalyst behavior.     

Influence of the surface conditions on permeation in the deuterium–MANET system

The condition of the surfaces is of crucial importance for the deuterium permeation through materials. In this work a study of the surface constants for the adsorption (σk₁) and release (σk₂) of deuterium under different surface conditions on the martensitic steel DIN 1.4914 (MANET) has been carried out. The growth of an oxide surface layer (Cr₂O₃) of about 25–30 nm in a MANET sample, heat treated in an oxidizing environment, compared to the bare MANET that have a ‘natural' oxide of about 5 nm has provoked a reduction of both the permeation rate and the recombination coefficient (about 3 orders of magnitude). In addition, the permeation governing process has changed from diffusion-limited to surface-limited. The measurements of the permeation rate of deuterium were performed by a gas-phase permeation technique over the temperature range 574–746 K and for deuterium driving pressures in the range from 3 to 10⁵ Pa.